JPS6313237U - - Google Patents
Info
- Publication number
- JPS6313237U JPS6313237U JP10590786U JP10590786U JPS6313237U JP S6313237 U JPS6313237 U JP S6313237U JP 10590786 U JP10590786 U JP 10590786U JP 10590786 U JP10590786 U JP 10590786U JP S6313237 U JPS6313237 U JP S6313237U
- Authority
- JP
- Japan
- Prior art keywords
- hole
- shaft
- flange
- handle
- stopper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006835 compression Effects 0.000 claims description 4
- 238000007906 compression Methods 0.000 claims description 4
- 229910000831 Steel Inorganic materials 0.000 claims description 2
- 239000010959 steel Substances 0.000 claims description 2
Landscapes
- Pressure Vessels And Lids Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10590786U JPS6313237U (en]) | 1986-07-09 | 1986-07-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10590786U JPS6313237U (en]) | 1986-07-09 | 1986-07-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6313237U true JPS6313237U (en]) | 1988-01-28 |
Family
ID=30980777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10590786U Pending JPS6313237U (en]) | 1986-07-09 | 1986-07-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6313237U (en]) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009117534A (ja) * | 2007-11-05 | 2009-05-28 | Hitachi Kokusai Electric Inc | 基板処理装置及び半導体装置の製造方法 |
-
1986
- 1986-07-09 JP JP10590786U patent/JPS6313237U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009117534A (ja) * | 2007-11-05 | 2009-05-28 | Hitachi Kokusai Electric Inc | 基板処理装置及び半導体装置の製造方法 |